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Thompson, L. F.
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Thompson, L. F.
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1
Book
Introduction to microlithography.
Thompson, L. F.
1994
Subject (ZB):
“
...plasma
etching
...
”
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Select result number 2
2
E-Book
Introduction to microlithography : theory, materials, and processing [E-Book] /
Thompson, L. F.
1983
Subject (ZB):
“
...Plasma
etching
....
”
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1
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1
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Book
2
Type of Literature
Conference Publication
1
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ZB
2
Name
Thompson, L. F.
Bowden, M. J.
1
Willson, C. G.
1
Subject
Lithography -- Research.
1
Microlithography.
1
Photolithography.
1
Photoresists.
1
Plasma etching.
1
Semiconductors -- Etching.
1
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lithography
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microlithography
1
plasma etching
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Classification
FGME - Microlithography
1
Language
English
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