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1
Book
Handbook of advanced plasma processing techniques /
Shul, R. J.
2000
Subject (ZB):
“
...
etching
...
”
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2
Book
Excimer lasers and new trends in laser microtechnology : International symposium workshop on excimer lasers and new trends in laser microtechnology: papers : Bremen, 10.11.92-13.11...
Metev, S.
1993
Subject (ZB):
“
...chemical
etching
...
”
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3
Book
Microelectronics processing: chemical engineering aspects /
Hess, D. W.
1989
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...plasma
etching
...
”
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3
Material Type
Book
3
Type of Literature
Conference Publication
1
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ZB
3
Name
Hess, D. W.
1
Metev, S.
1
Shul, R. J.
1
Subject
microelectronics
materials processing
2
VLSI technology
1
ablation
1
chemical etching
1
chemical vapor deposition
1
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compound semiconductor
1
diamond
1
electronic packaging
1
etching
1
film deposition
1
gas
1
irradiation
1
laser
1
liquid phase epitaxy
1
magnetic material
1
microlithography
1
microtechnology
1
photoresist
1
plasma etching
1
plasma processing
1
polypropylene
1
processing
1
surface activity
1
synthesis
1
technology transfer
1
vapor phase epitaxy
1
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Classification
FGM - Microelectronic technology
2
FGKJ - Plasma processing, etching
1
PEJ - Laser physics, laser materials
1
Language
English
1
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