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1
E-Book
The Nature of biological systems as revealed by thermal methods [E-Book] /
Lorinczy, Denes
2005
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2
Book
Advances in rapid thermal and integrated processing : NATO advanced study institute on advances in rapid thermal and integrated processing: proceedings : Acquafredda-di-Maratea, 03...
Roozeboom, F.
1996
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3
Book
Rapid thermal and integrated processing 0003: symposium : San-Francisco, CA, 04.04.94-07.04.94.
Wortman, J. J.
1994
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4
Book
Rapid thermal processing : science and technology /
Fair, Richard B.
1993
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5
Book
Rapid thermal and integrated processing 0002 : Rapid thermal and integrated processing: symposium: papers : MRS spring meeting 1993: symposium G: papers : San-Francisco, CA, 12.04....
Gelpey, J. C.
1993
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6
Book
Rapid thermal and integrated processing : SPIE conference on rapid thermal and integrated processing: proceedings : San-Jose, CA, 10.09.91-11.09.91.
Moslehi, M. M.
1992
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7
Book
Rapid thermal and integrated processing : Symposium F rapid thermal and integrated processing: papers : MRS spring meeting 1991 : Anaheim, CA, 30.04.91-03.05.91.
Gelpey, J. C.
1991
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8
Book
Rapid thermal annealing/chemical vapor deposition and integrated processing : Symposium on rapid thermal annealing/chemical vapor deposition and integrated processing : Materials R...
Hodul, D.
1989
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9
Book
Fundamentals of beam solid interactions and transient thermal processing: symposium : Boston, MA, 30.11.87-03.12.87 /
Aziz, Michael J.
1988
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10
Book
Rapid thermal processing of electronic materials: symposium : Materials Research Society Spring Meeting : Anaheim, CA, 21.04.87-23.04.87.
Wilson, S. R.
1987
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11
Book
Symposium on materials issues in silicon integrated circuit processing : Palo-Alto, CA, 15.04.1986-18.04.1986.
Wittmer, M.
1986
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12
Book
Rapid thermal processing: symposium : Materials Research Society Fall Meeting. 1985 : Boston, MA, 02.12.85-04.12.85.
Sedgwick, T. O.
1986
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Available as
Print Edition
11
Electronic Edition
1
Material Type
Book
12
Type of Literature
Conference Publication
10
Year of Publication
From:
To:
Location
ZB
12
IBN-1-2
1
Name
Gelpey, J. C.
2
Aziz, Michael J.
1
Fair, Richard B.
1
Hodul, D.
1
Lorinczy, Denes
1
Moslehi, M. M.
1
more ...
Rehn, Lynn E.
1
Roozeboom, F.
1
Sedgwick, T. O.
1
Stritzker, Bernd
1
Wilson, S. R.
1
Wittmer, M.
1
Wortman, J. J.
1
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Subject
rapid thermal processing
12
chemical vapor deposition
2
semiconductor
2
calorimetry
1
dielectric material
1
emissivity
1
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epitaxy
1
ion implantation
1
semiconductor epitaxy
1
semiconductor processing
1
temperature measurement
1
thermal properties
1
thermal stress
1
thin film technology
1
wafer scale integration
1
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Classification
FGJ - Laser and electron beam processing
9
FAF - Materials research - comprehensive works
7
CTLN - Calorimetry
1
FGCD - Crystal growth of specific substances
1
FGGE - Ion beam surface modification
1
FGM - Microelectronic technology
1
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FGMH - Metallization, physics of microelectronics
1
LCR - Ecology of microorganisms - land and water
1
LKRS - Biochemistry of enzymes - reactions
1
LVE - Food science - general
1
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Language
English
1
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