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IEK-14
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1
Book
Analysis of microelectronic materials and devices.
Grasserbauer
,
Manfred
1991
Other Personal Name(s):
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Grasserbauer
,
Manfred
...
”
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IEK-14
ZB
1
Name
Grasserbauer, Manfred
1
Subject
materials characterization
1
microelectronics
1
surface analysis
1
Classification
FGML - Characterization of electronic materials
1
FHA - Materials characterization - general aspects
1
FHAB - Surface and thin film characterization
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