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FGME - Microlithography
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FGME - Microlithography
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Advances in electronics and electron physics. Microelectronics and microscopy /
Hawkes
,
Peter
W
.
1992
Other Personal Name(s):
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...
Hawkes
,
Peter
W
....
”
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1
Name
Hawkes, Peter W.
1
Subject
electron beam lithography
1
microelectronics
1
scanning electron microscopy
1
Classification
FGME - Microlithography
FHJ - Scanning electron microscopy, analytical electron microscopy
1
TEA - Electrical engineering - general
1
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English
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