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1
Book
Dry etching for microelectronics.
Powell
,
R
.
A
.
1984
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R
.
A
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2
Book
Thermal conductivity of metals and alloys at low temperatures : A review of the literature.
Powell
,
R
. L.
1954
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R
. L....
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ZB
2
IEK-5
1
Name
Blanpied, W. A.
1
Powell, R. A.
1
Powell, R. L.
1
Subject
etching
1
Classification
FGKJ - Plasma processing, etching
1
FGM - Microelectronic technology
1
PAD - Physics - comprehensive works
1
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