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1
Book
Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
Rai
-
Choudhury
,
P
.
1997
Other Personal Name(s):
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...
Rai
-
Choudhury
,
P
....
”
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Select result number 2
2
Book
Handbook of microlithography, micromachining, and microfabrication. 2. Micromachining and microfabrication /
Rai
-
Choudhury
,
P
.
1997
Other Personal Name(s):
“
...
Rai
-
Choudhury
,
P
....
”
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2
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Book
2
Type of Literature
Handbook, Textbook
2
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ZB
2
Name
Rai-Choudhury, P.
2
Subject
microlithography
2
X-ray lithography
1
electron beam lithography
1
microfabrication (for microelectronics only)
1
optical microlithography
1
Classification
FGME - Microlithography
2
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