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FGKJ - Plasma processing, etching
Print Edition
IEK-4
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FGKJ - Plasma processing, etching
Print Edition
IEK-4
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1
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Glow discharge processes : sputtering and plasma etching /
Chapman, Brian N.
1980
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2
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Industrial plasma engineering. 2. Applications to nonthermal plasma processing /
Roth, J. Reece.
2001
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3
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Plasma processing: symposium : Palo-Alto, CA, 15.04.1986-18.04.1986.
Coburn, J. W.
1986
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4
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Plasma-surface interactions and processing of materials : NATO Advanced Study Institute on Plasma Surface Interactions and Processing of Materials: proceedings : Alicante, 04.09.88...
Auciello, Orlando
1990
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5
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Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
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Print Edition
Material Type
Book
5
Type of Literature
Conference Publication
2
Handbook, Textbook
1
Year of Publication
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IEK-4
ZB
3
Name
Auciello, Orlando
1
Chapman, Brian N.
1
Coburn, J. W.
1
Flamm, Daniel L.
1
Gras-Marti, Alberto
1
Lichtenberg, Allan J.
1
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Lieberman, Michael E.
1
Roth, J. Reece.
1
Valles-Abarca, Jose Antonia
1
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Subject
plasma etching
3
plasma processing
3
chemical vapor deposition
1
discharge
1
glow discharge
1
ion implantation
1
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plasma deposition
1
plasma physics
1
sputtering
1
thin film technology
1
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Classification
FGKJ - Plasma processing, etching
PGA - Plasma physics
2
FAF - Materials research - comprehensive works
1
FGKC - Vacuum deposition, MBE
1
PGCC - Electric discharges in gases
1
Language
English
2
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