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FGN - Nanotechnology
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Encyclopedia of Microfluidics and Nanofluidics [E-Book] /
Li, Dongqing.
2008
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Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /
Madou, Marc J.
2011
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