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IBN-1-2
oxide coating
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IBN-1-2
oxide coating
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1
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Reaktives Sputtern von Oxidfilmen: Herstellung dielektrischer dünner Schichten für technische Anwendungen /
Stollenwerk, J.
1993
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IBN-1-2
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Stollenwerk, J.
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oxide coating
sputter deposition
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FGGE - Ion beam surface modification
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