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thin film technology
FGM - Microelectronic technology
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thin film technology
FGM - Microelectronic technology
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Oberflächeninduzierte Abscheidung von Siliziumdioxid aus der Gasphase /
Grassl, Thomas.
1998
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2
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Untersuchungen der Elektronenemissionseigenschaften von mikrostrukturierten Metall Isolator Metall (MIM) Dünnschichtkathoden für die parallelprojizierende Elektronenstrahl Lithogra...
Benz, Reinhard.
1995
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Benz, Reinhard.
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Grassl, Thomas.
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thin film technology
cathode
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chemical vapor deposition
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lithography
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FGM - Microelectronic technology
FFGH - Electron emission, field emission
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FGK - Thin film technology, epitaxy
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