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Breuer, Uwe
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Schäfer, Anna
Analytik; ZEA-3
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Halbleiter-Nanoelektronik; PGI-9
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Breuer, Uwe
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Schäfer, Anna
Analytik; ZEA-3
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Halbleiter-Nanoelektronik; PGI-9
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Journal Article
Reduction of silicon dioxide interfacial layer to 4.6 A EOT by Al remote scavenging in high K/metal gate stacks on Si
Nichau, Alexander
2013
Microelectronic engineering, 109 S. 109 - 112
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Conference Presentation
Reduction of silicon dioxide interfacial layer to 4.6 A EOT by Al remote scavenging in high-k/metal gate stacks on Si
Nichau, Alexander
2013
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Conference Presentation
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Journal Article
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Bernardy, Patric
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Besmehn, Astrid
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Breuer, Uwe
Buca, Dan Mihai
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Knoll, Lars
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Mantl, Siegfried
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Nichau, Alexander
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Schram, T.
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Schäfer, Anna
Wirths, Stephan
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Frontiers of charge based Electronics
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Peter Grünberg-Centre (PG-C)
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Analytik; ZEA-3
Halbleiter-Nanoelektronik; PGI-9
Mikrostrukturforschung; PGI-5
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