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Dauelsberg, M.
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Regnery, S.
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Schumacher, M.
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Waser, R.
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Dauelsberg, M.
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Regnery, S.
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1
Journal Article
BST thin films grown in a multi-wafer MOCVD reactor
Fitsilis, F.
2001
Journal of the European Ceramic Society, 21 (2001) S. 1547 - 1551
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Growth of (Ba,Sr)TiO3 thin films in a multi-wafer MOCVD reactor
Ehrhart, P.
2001
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Deposition of BST thin films in a multi-wafer MOCVD reactor
Ehrhart, P.
2000
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Conference Presentation
Growth of (Ba,Sr) TiO3 thin films in a multiwafer MOCVD reactor
Ehrhart, P.
2000
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Dauelsberg, M.
Ehrhart, P.
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Fitsilis, F.
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Regnery, S.
Schienle, F.
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Strzyzewski, P.
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Festkörperforschung für die Informationstechnik
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Elektrokeramische Materialien; IFF-EKM
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Institut für Festkörperforschung; IFF
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