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Detavernier, C.
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Kappius, L.
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Lenk, Steffi
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Mantl, S.
Ionentechnik
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Journal Article
Nanometer patterning of thin CoSi2-films by application of local stress
Kluth, P.
2001
Microelectronic engineering, 55 (2001) S. 177
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Bay, H.
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Ionentechnik
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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