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Conference Presentation
MOCVD of SrTa2O6 thin films for high-k applications
Regnery, S.
2004
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Conference Presentation
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Ding, Y.
Ehrhart, P.
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Haselier, H.
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He, J.
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Jia, C. L.
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Lehnen, P.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Center of Nanoelectronic Systems for Information Technology; CNI
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Elektronische Materialien; IFF-IEM
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Mikrostrukturforschung; IFF-IMF
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