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Ding, Y.
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Schumacher, M.
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Waser, R.
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Ding, Y.
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Schumacher, M.
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Waser, R.
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1
Conference Presentation
MOCVD of SrTa2O6 thin films for high-k applications
Regnery, S.
2004
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Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor
Regnery, S.
2003
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Journal Article
(Ba,Sr)TiO3 thin film growth in a batch processing MOCVD reactor
Regnery, S.
2003
Journal of the European Ceramic Society, 24 (2003) S. 271-276
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(Ba,Sr)TiO3 thin films growth in a batch processing MOCVD reactor
Regnery, S.
2002
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Ding, Y.
Jia, C. L.
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Regnery, S.
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Waser, R.
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Schienle, F.
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Fitsilis, F.
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Szot, K.
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Haselier, H.
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He, J.
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Juergensen, H.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Contributing Institute
Mikrostrukturforschung; IFF-IMF
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Center of Nanoelectronic Systems for Information Technology; CNI
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Elektrokeramische Materialien; IFF-EKM
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Elektronische Materialien; IFF-IEM
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Scientific Report
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2002
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