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Goryll, M.
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van der Hart, A.
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Journal Article
Top contact for vertical double-gate MOSFETs
Moers, J.
2002
Microelectronic engineering, 64 (2002) S. 465 - 471
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Poster
Top contact for vertical double-gate MOSFETs
Moers, J.
2002
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Hogg, S.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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