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1

Journal Article

Liquid injection atomic layer deposition of crystalline TiO2 thin films with a smooth morphology from Ti(O-i-Pr)2(DPM)2

Kim, S. K.
2009

Journal of the Electrochemical Society, 156 (2009) S. D296 - D300

2

Journal Article

Growth of noble metal Ru thin films by liquid injection atomic layer deposition

Kim, S. K.
2009

The @journal of physical chemistry / C, 113 (2009) S. 11329

3

Conference Presentation

Liquid injection atomic layer deposition of metallic Ru and RuO2 thin films for electrode applications

Hoffmann-Eifert, S.
2009

4

Conference Presentation

Liquid injection atomic layer deposition of metallic Ru thin films from Ru(tmhd)3 and of high-k TiO2 thin films from Ti(O-i-Pr)2(tmhd)2

Hoffmann-Eifert, S.
2009

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