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Lüth, H.
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Trellenkamp, Stefan
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Moers, J.
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Vescan, L.
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Lüth, H.
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1
Talk (non-conference)
Investigation of thin MOSFET gate oxides
Goryll, M.
2002
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2
Conference Presentation
Thin low-temperature gate oxides for vertical field-effect transistors
Goryll, M.
2002
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3
Talk (non-conference)
Double-gate MOSFET with vertical layout
Moers, J.
2002
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4
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Thin low-temperature gate oxides for vertical field-effect transistors
Goryll, M.
2002
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5
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Vertical double-gate MOSFET based on epitaxial growth by LPCVD
Moers, J.
2001
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6
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Vertical double-gate MOSFET based on epitaxial growth by LPCVD
Moers, J.
2001
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Talk (non-conference)
3
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Kordos, P.
6
Lüth, H.
Marso, M.
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Moers, J.
Trellenkamp, Stefan
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Goryll, M.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
4
Halbleiterbauelemente und Analytik
2
Halbleiterschichtsysteme und Mesoskopische Strukturen
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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