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Lüth, H.
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Trellenkamp, Stefan
Institut für Bio- und Chemosensoren; ISG-2
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Lüth, H.
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Trellenkamp, Stefan
Institut für Bio- und Chemosensoren; ISG-2
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Conference Presentation
Nanostrukturierung und optische Lithographie mit DUV-Photoresists bei der Herstellung vertikaler MOSFETs
Trellenkamp, S.
2001
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Flücken, R.
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Kordos, P.
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Lüth, H.
Marso, M.
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Trellenkamp, Stefan
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Halbleiterbauelemente und Analytik
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Halbleiterschichtsysteme und Mesoskopische Strukturen
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Ionen- und Lithographietechnik
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Institut für Bio- und Chemosensoren; ISG-2
Institut für Halbleiterschichten und Bauelemente; ISG-1
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2001
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