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Lüth, H.
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Vescan, L.
Contribution to a book
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Lüth, H.
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1
Contribution to a book
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Thin low-temperature gate oxides for vertical field-effect transistors
Goryll, M.
2002
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2
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Vertical double-gate MOSFET based on epitaxial growth by LPCVD
Moers, J.
2001
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3
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Vertical silicon MOSFETs based on selective epitaxial growth
Moers, J.
2000
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4
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Morphological transition of Ge islands on Si(001) grown by LPCVD
Goryll, M.
2000
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5
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Carbon-induced Ge islands on Si(001) grown by LPCVD
Goryll, M.
2000
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Morphological transition of Ge islands on Si(001) grown by LPCVD
Goryll, M.
1999
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Contribution to a book
Contribution to a conference proceedings
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Lüth, H.
Vescan, L.
Goryll, M.
4
Kordos, P.
3
Marso, M.
3
Moers, J.
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Trellenkamp, Stefan
2
Fox, P. T.
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Klaes, D.
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Tönnesmann, A.
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van der Hart, A.
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Research Program
Halbleiterschichtsysteme und Mesoskopische Strukturen
3
Halbleiterbauelemente und Analytik
2
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
1
ohne FE
1
Contributing Institute
Institut für Schicht- und Ionentechnik; ISI
4
Institut für Halbleiterschichten und Bauelemente; ISG-1
2
Scientific Report
2000
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1999
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