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Lüth, H.
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Ruge, C.
Ionen- und Lithographietechnik
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Lüth, H.
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Ruge, C.
Ionen- und Lithographietechnik
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Talk (non-conference)
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Talk (non-conference)
Kapazitive pH-Sensoren auf der Basis von makroporösem Silizium mit Doppelisolatorschicht aus thermisch oxidiertem SiO2 und LPCVD-Si3N4
Simonis, A.
2001
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Talk (non-conference)
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Ecken, H.
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Lüth, H.
Ruge, C.
Schöning, Michael J.
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Simonis, A.
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Halbleiterbauelemente und Analytik
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Halbleiterschichtsysteme und Mesoskopische Strukturen
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Ionen- und Lithographietechnik
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Institut für Bio- und Chemosensoren; ISG-2
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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