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Lüth, H.
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Marso, M. A.
1999
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Lüth, H.
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Marso, M. A.
1999
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1
Journal Article
Coupling of insect antennae to field-effect transistors for biochemical sensing
Schroth, P.
1999
Electrochimica acta, 44 (1999) S. 3821
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2
Talk (non-conference)
Integrated photometer with porous silicon interference filters
Hunkel, D. G.
1999
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3
Journal Article
A 19 Ghz vertical Si p-channel MOSFET
Moers, J.
1999
Electronics letters, 35 (1999) S. 239
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4
Talk (non-conference)
Vertikale Si-MOSFETs mit reduzierten parasitären Kapazitäten
Moers, J.
1999
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5
Journal Article
Vertical p-MOSFETs with gate oxide deposition before selective epitaxial growth
Moers, J.
1999
Solid state electronics, 43 (1999) S. 529 - 535
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6
Talk (non-conference)
Lateral variation of the etchrate of porous silicon by patterning
Arens-Fischer, R.
1999
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6
Document Type
Journal Article
3
Talk (non-conference)
3
Name
Lüth, H.
Marso, M. A.
Kordos, P.
4
Klaes, D.
3
Moers, J.
3
Tönnesmann, A.
3
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Vescan, L.
3
Wickenhäuser, S.
3
Arens-Fischer, R.
2
Hunkel, D. G.
2
Berger, M.
1
Butz, R.
1
Grabolla, T.
1
Hummel, H. E.
1
Malkoc, Ü.
1
Schroth, P.
1
Schöning, Michael J.
1
Schütz, S.
1
Steffen, A.
1
Thönissen, M.
1
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Research Program
Halbleiterbauelemente und Analytik
5
Halbleiterschichtsysteme und Mesoskopische Strukturen
1
Contributing Institute
Institut für Schicht- und Ionentechnik; ISI
6
Scientific Report
1999
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