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Liedtke, R.
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Waser, R.
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
2002
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Liedtke, R.
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Waser, R.
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
2002
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1
Journal Article
Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for MEMS application
Hoffmann, M.
2002
Integrated ferroelectrics, 50 (2002) S. 21 - 32
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2
Journal Article
Influence of the film-electrode interface in thin-film capacitors
Ellerkmann, U.
2002
Ferroelectrics, 271 (2002) S. 315 - 320
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3
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Leakage current properties of Ba0,7 Sr0,3 TiO3 thin films depending on the film thickness
Kügeler, C.
2002
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Structural and morphologic evolution of Pt/Ba0,7Sr0,3TiO3/Pt capacitors with annealing processes
Quin, Y. L.
2002
Journal of applied physics, 80 (2002) S. 2728 - 2730
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Journal Article
3
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1
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Liedtke, R.
Waser, R.
Böttger, U.
1
Ellerkmann, U.
1
Hoffmann, M.
1
Jia, C. L.
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Kügeler, C.
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Leuerer, T.
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Mokwa, W.
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Quin, Y. L.
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Urban, K.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
Kondensierte Materie
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Elektrokeramische Materialien; IFF-EKM
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Mikrostrukturforschung; IFF-IMF
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