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Littmark, U.
Kondensierte Materie
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Littmark, U.
Kondensierte Materie
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Journal Article
Adjustable hydrogen atom incorporation into sputter desposited a-SiC
Tschersich, K. G.
2006
Thin solid films, 515 (2006) S. 464 - 467
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Conference Presentation
Adjustable hydrogen atom incorporation into sputter deposited a-SiC
Tschersich, K. G.
2005
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Beyer, W.
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Littmark, U.
Tschersich, K. G.
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Kondensierte Materie
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Photovoltaik
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Institut für Photovoltaik; IPV
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Biologische Schichten; ISG-4
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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Institut für biologisch-anorganische Grenzflächen; ISG-4
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