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Makarov, Yu. N.
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Makarov, Yu. N.
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1
Conference Presentation
MOVPE process for horizontal reactors with reduced parasitic deposition
Hardtdegen, H.
2004
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Journal Article
MOVPE process for horizontal reactors with reduced parasitic deposition
Hardtdegen, H.
2004
Journal of crystal growth, 272 (2004) S. 407 - 414
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3
Journal Article
MOVPE growth and in situ characterization of GaN layers on sapphire substrates
Hardtdegen, H.
2004
Physica status solidi / A, 201 (2004) S. 312 - 319
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Conference Presentation
Use of Modeling to Develop a New GaN Growth Process with Reduced Parasitic Deposits
Kaluza, N.
2003
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4
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Conference Presentation
2
Journal Article
2
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Hardtdegen, Hilde
4
Kaluza, N.
4
Makarov, Yu. N.
Schmidt, R.
4
Steins, R.
4
Talalaev, R. A.
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Yakovlev, E. V.
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Wirtz, K.
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Zettler, J.-T.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
4
Scientific Report
2004
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2003
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