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1

Journal Article

Monitoring of the growth of microcrystalline silicon by plasma-enhanced chemical vapor deposition using in-situ Raman spectroscopy

Muthmann, S.
2011

Physica status solidi / Rapid research letters, 5 (2011) S. 144 - 146

“...Köhler, Florian...”

2

Contribution to a book
Contribution to a conference proceedings

Monitoring the growth of microcrystalline silicon deposited by plasma-enhanced chemical vapor deposition using in-situ Raman spectroscopy

Muthmann, S.
2011

“...Köhler, Florian...”

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