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Schienle, F. AND Schumacher, M. AND Waser, R.

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Schienle, F. AND Schumacher, M. AND Waser, R.

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Conference Presentation 3 Journal Article 3 Poster 3 Contribution to a book 2 Contribution to a conference proceedings 2

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Growth of (Ba,Sr)TiO3 thin films by MOCVD: stoichiometry effects

Ehrhart, P.
2003

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2

Contribution to a book
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Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor

Regnery, S.
2003

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Journal Article

(Ba,Sr)TiO3 thin film growth in a batch processing MOCVD reactor

Regnery, S.
2003

Journal of the European Ceramic Society, 24 (2003) S. 271-276

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(Ba,Sr)TiO3 thin films growth in a batch processing MOCVD reactor

Regnery, S.
2002

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Conference Presentation

Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor

Regnery, S.
2002

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Journal Article

Growth of (Ba,Sr)TiO3 thin films by MOCVD : stoichiometry effects

Ehrhart, P.
2002

Integrated ferroelectrics, 45 (2002) S. 59 - 68

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7

Contribution to a book
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Growth of (Ba,Sr)TiO3 thin films in a multi-wafer MOCVD reactor

Ehrhart, P.
2001

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BST thin films grown in a multi-wafer MOCVD reactor

Fitsilis, F.
2001

Journal of the European Ceramic Society, 21 (2001) S. 1547 - 1551

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Conference Presentation

Growth of (Ba,Sr) TiO3 thin films in a multiwafer MOCVD reactor

Ehrhart, P.
2000

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Deposition of BST thin films in a multi-wafer MOCVD reactor

Ehrhart, P.
2000

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Conference Presentation

BST thin films growth in a multiwafer MOCVD reactor

Fitsilis, F.
2000

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Publications database 11

Conference Presentation 3 Journal Article 3 Poster 3 Contribution to a book 2 Contribution to a conference proceedings 2

Regnery, S. 11 Schienle, F. Schumacher, M. Waser, R. Ehrhart, P. 10 Fitsilis, F. 10 more ... Juergensen, H. 5 Dauelsberg, M. 4 Jürgensen, H. 4 Strzyzewski, P. 4 Ding, Y. 3 Jia, C. L. 3 Krumpen, W. 2 Lindner, J. 2 Ehrhart, F. 1 Jia, C. 1 McEntee, T. 1 Miedl, S. 1 Szot, K. 1 see all ... less ...

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik 6 Festkörperforschung für die Informationstechnik 5

Elektrokeramische Materialien; IFF-EKM 7 Institut für Festkörperforschung; IFF 3 Mikrostrukturforschung; IFF-IMF 3 Center of Nanoelectronic Systems for Information Technology; CNI 1 Elektronische Materialien; IFF-IEM 1 Zentralabteilung für Chemische Analysen; ZCH 1

2000 3 2002 3 2001 2 2003 2 2004 1

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