JuLib | Articles & more

1

Liquid injection atomic layer deposition of lead zirconate titanate thin films for three dimensional ferroelectric capacitor structures

Hoffmann-Eifert, S.
2009

2

Poster

Ferroelectric Pb(ZrxTi1-x)O3 thin films grown by liquid injection ALD into three dimensional capacitor structures

Hoffmann-Eifert, S.
2008

3

Conference Presentation

Liquid Injection Atomic Layer Deposition of Perovskite-type Multi-component Oxide Thin Films for Three Dimensional Ferroelectric Capacitor Structures

Hoffmann-Eifert, S.
2008

4

Journal Article

Growth behavior of atomic-layer-deposited Pb(Zr,Ti)Ox thin films on planar substrate and three-dimensional hole structures

Watanabe, T.
2008

Journal of the Electrochemical Society, 155 (2008) S. D715

5

Journal Article

Growth of ternary PbTiOx films in a combination of binary oxide atomic layer depositions

Watanabe, T.
2007

Journal of applied physics, 101 (2007) S. 014114

Get full text OpenAccess OpenAccess

6

Conference Presentation

Liquid injection atomic layer deposition of Pb(Zr,Ti)O3 thin films on three dimensional structures

Watanabe, T.
2007

7

Journal Article

Liquid injection ALD of Pb(Zr,Ti)Ox thin films by a combination of self-regulating component oxide processes

Watanabe, T.
2007

Journal of the Electrochemical Society, 154 (2007) S. G262 - G269

8

Journal Article

Liquid Injection Atomic Layer Deposition of TiOx Films Using Ti[OCH(CH3)2]4

Watanabe, T.
2007

Journal of the Electrochemical Society, 154 (2007) S. G134 - G140

9

Poster

Nano crossbar arrays for resistively switcing TiOx passive two-terminal memory cells

Nauenheim, C.
2007

10

Conference Presentation

Liquid injection atomic layer deposition of Pb(Zr,Ti)O3 thin films

Hoffmann-Eifert, S.
2007

11

Conference Presentation

Conformal growth of homogeneous Pb(Zr,Ti)O3 films on 3D structures using a liquid injection ALD method

Hoffmann-Eifert, S.
2007

Narrow Search Results