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Zimmermann, T.
Contribution to a book
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High-Rate Dynamic VHF Plasma Deposition of a-Si:H and µc-Si:H Thin-Film Solar Cells
Flikweert, A. J.
2011
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Dynamic High Rate Deposition of Microcrystalline Silicon with Very High Excitation Frequencies (80-150MHz) Using Linear Plasma Sources
Strobel, C.
2011
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Investigation on layer properties of amorphous and microcrystalline silicon deposited with moving substrates in combination with a VHF linear plasma source designed for the fabrica...
Strobel, C.
2007
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Albert, M.
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Zimmermann, T.
Beyer, W.
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Kuske, J.
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Erneuerbare Energien
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Photovoltaik; IEK-5
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