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Elektrokeramische Materialien; IFF-EKM
Contribution to a book
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Elektrokeramische Materialien; IFF-EKM
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1
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Integration, electrical and electromechanical properties of PZT and PMN-Pt thin films for MEMS applications
Kügeler, C.
2002
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Investigation of the role of carbonylchemistry to pattern platinum electrodes
Schneider, St.
2002
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Size effects on polarization in epitaxial ferroelectric films and the concept of ferroelectric tunnel junctions including first results
Kohlstedt, H.
2002
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Structural and ferroelectric properties of epitaxial PbZr 0,52 Ti 0,48 O3 and Ba TiO3 thin films prepared on SrRuO3/SrTiO3(100) substrates
Rodriguez Contreras, J.
2002
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Contribution to a book
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Waser, R.
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Kohlstedt, H.
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Böttger, U.
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Poppe, T. D.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Elektrokeramische Materialien; IFF-EKM
Institut für Halbleiterschichten und Bauelemente; ISG-1
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Mikrostrukturforschung; IFF-IMF
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