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Journal of vacuum science & technology / A, 27 (2009) S. 503 - 514
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Cheng, X.
2009
Applied surface science, 256 (2009) S. 921 - 923
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Cheng, X.
2009
Microelectronic engineering, 86 (2009) S. 2404 - 2407
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Applied physics letters, 91 (2007) S. 063113-1
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Journal of applied physics, 101 (2007) S. 104109-1 - 104109
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