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1

Journal Article

Effect of helium ion implantation and annealing on the relaxation behaviour of pseudomorphic Si1-xGex/Si(100) buffer layers on Si (100) substrates

Luysberg, M.
2002

Journal of applied physics, 92 (2002) S. 4290 - 4295

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”
OpenAccess

2

Contribution to a book
Contribution to a conference proceedings

Effect of helium ion implantation and annealing on the relaxation behaviour of pseudomorphic Si1-xGex/Si(100) buffer layers on Si (100) substrates

Luysberg, M.
2002

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

3

Contribution to a book
Contribution to a conference proceedings

Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si(1-x)Gex films on silicon

Holländer, B.
2001

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

4

Journal Article

Strain relaxation of pseudomorphic Si(1-X)GeX/Si(100) heterostructures after hydrogen or helium ion implantation for virtual substrate fabrication

Holländer, B.
2001

Nuclear instruments & methods in physics research / B, 175/177 (2001) S. 357 - 367

“...Mikrostrukturforschung; IFF-IMF Mikrostrukturforschung...”

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