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1

Using ALD and AVD-techniques for scaled gate stacks

Schäfer, A.
2012

“...Tiedemann, A....”

2

Contribution to a book

Electrical and structural properties of ternary rare-earth oxides on Si and higher mobility substrates and their integration as high-k gate dielectrics in MOSFET devices

Lopes, J.M.J.
2011

“...Tiedemann, A....”

3

Conference Presentation

Impact of strain and Ge concentration on the performance of planar SiGe band-to-band-tunneling transistors

Schmidt, M.
2011

“...Tiedemann, A....”

4

Contribution to a book
Contribution to a conference proceedings

Impact of strain and Ge concentration on the performance of planar SiGe band-to-band-tunneling transistors

Schmidt, M.
2011

“...Tiedemann, A....”

5

Journal Article

Atomic layer deposition of HfO2 and Al2O3 layers on 300 mm Si wafers for gate stack technology

Lupták, R.
2011

Journal of vacuum science & technology / B, 29 (2011) S. 01A301

“...Tiedemann, A.T....”

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