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Mikrostrukturforschung; IFF-IMF
Hackbarth, T.
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Mikrostrukturforschung; IFF-IMF
Hackbarth, T.
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Journal Article
High frequency n-Type MODFETs on ultra-thin virtual SiGe substrates
Hackbarth, T.
2003
Solid state electronics, 47 (2003) S. 1179 - 1182
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Poster
Thin strain relaxed SiGe buffer layers on Si and SOI made by He ion implantation and annealing
Mantl, S.
2003
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Thin strain relaxed SiGe buffer layers on Si and SOI made by He ion implantation and annealing
Mantl, S.
2003
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Hackbarth, T.
Holländer, Bernhard
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Luysberg, Martina
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Mantl, S.
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Bauer, M.
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Herzog, H. J.
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Hogg, S. M.
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Lenk, Steffi
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Loo, R.
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Fichtner, P. F. P.
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Herzog, H.-J.
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Hueging, N.
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Hüging, N.
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Research Program
Kondensierte Materie
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Mikrostrukturforschung; IFF-IMF
Institut für Halbleiterschichten und Bauelemente; ISG-1
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2003
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