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Schubert, Jürgen
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Littmark, U.
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Schubert, Jürgen
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Journal Article
Amorphous ternary rare-earth gate oxides for future integration in MOSFETs
Lopes, J. M. J.
2009
Microelectronic engineering, 86 (2009)
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Isotopic labeling study of oxygen diffusion in amorphous LaScO3 high-k films on Si(100) and its effects on the electrical characteristics
Lopes, J. M. J.
2009
Applied physics / A, 96 (2009) S. 447 - 451
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Besmehn, A.
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Breuer, U.
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Dürgün-Özben, Eylem
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Lenk, Steffi
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Littmark, U.
Lopes, J. M. J.
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Mantl, S.
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Roeckerath, M.
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Schubert, Jürgen
Grande, P.L.
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Grundlagen für zukünftige Informationstechnologien
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Halbleiter-Nanoelektronik; IBN-1
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JARA-FIT; JARA-FIT
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Zentralabteilung für Chemische Analysen; ZCH
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Mikrostrukturforschung; IFF-8
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