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Controlling Configuration-Based Phenomena
Open Access
JARA-FIT; JARA-FIT
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Halbleiter-Nanoelektronik; PGI-9
Journal Article
Grochowicz, Maciej
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Controlling Configuration-Based Phenomena
Open Access
JARA-FIT; JARA-FIT
AND
Halbleiter-Nanoelektronik; PGI-9
Journal Article
Grochowicz, Maciej
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Journal Article
Computational proximity lithography with extreme ultraviolet radiation
Deuter, Valerie
2020
Optics express, 28 (2020) 18, S. 27000 -
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Research Program
Controlling Configuration-Based Phenomena
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Halbleiter-Nanoelektronik; PGI-9
JARA Institut Green IT; PGI-10
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