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Ionentechnik
Lenk, Steffi
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Detavernier, C.
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Ionentechnik
Lenk, Steffi
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Detavernier, C.
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Journal Article
Nanometer patterning of thin CoSi2-films by application of local stress
Kluth, P.
2001
Microelectronic engineering, 55 (2001) S. 177
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Journal Article
Growth of patterned thin epitaxial CoSi2-films by a titanium oxide mediated epitaxy process
Kluth, P.
2000
Thin solid films, 380 (2000) S. 201
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Detavernier, C.
Kluth, P.
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Lenk, Steffi
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Ionentechnik
Ionen- und Lithographietechnik
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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Institut für Bio- und Chemosensoren; ISG-2
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2001
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