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Ionentechnik
Lenk, Steffi
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Kappius, L.
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Ionentechnik
Lenk, Steffi
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Kappius, L.
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1
Conference Presentation
MBE-Wachtum einer Si/CoSi2/Ge Heterostruktur für vertikale Photodetektoren
Winnerl, S.
2001
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Journal Article
Nanometer patterning of thin CoSi2-films by application of local stress
Kluth, P.
2001
Microelectronic engineering, 55 (2001) S. 177
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Poster
Surfactant-mediated growth of Ge on a CoSi2 layer on Si(111) for vertical photodetectors
Winnerl, S.
2001
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Talk (non-conference)
MBE-growth of a Si/CoSi2/Ge heterostructure vertical-metal-semiconductor-metal photodetectors
Winnerl, S.
2001
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Conference Presentation
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Kappius, L.
Lenk, Steffi
Mantl, S.
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Buchal, C.
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Winnerl, S.
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Buca, Dan Mihai
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Bay, H.
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Detavernier, C.
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Fray, S.
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Kluth, P.
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Xu, J.
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Zhao, Q. T.
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Research Program
Ionentechnik
Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
4
Scientific Report
2001
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