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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
Luysberg, Martina
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Hueging, N.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
Luysberg, Martina
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Hueging, N.
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Conference Presentation
The use of ion implantation and annealing for the fabrication of strained silicon on thin SiGe virtual substrates
Mantl, S.
2004
“
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Buca
,
Dan
Mihai
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Conference Presentation
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Buca, Dan Mihai
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Holländer, Bernhard
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Hueging, N.
Lenk, Steffi
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Luysberg, Martina
Mantl, S.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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2004
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