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1999
Mantl, S.
Contribution to a conference proceedings
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1999
Mantl, S.
Contribution to a conference proceedings
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Contribution to a conference proceedings
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1
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Effect of the oxidation of a silicide layer on dopant diffusion in underlying silicon
Kappius, L.
1999
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2
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Ultrafast silicon based internal photoemission detectors
Löken, M.
1999
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3
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Fabrication of nanometer Schottky-tunnel MOSFETs by a novel silicide nanopatterning method
Zhao, Q. T.
1999
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4
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Ultrafast Si-based MSM mesa photodetectors with optical waveguide connection
Buchal, C.
1999
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5
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Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication
Mantl, S.
1999
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6
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Growth, patterning and microelectronic applications of epitaxial cobalt-di-silicide
Mantl, S.
1999
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6
Document Type
Contribution to a book
6
Contribution to a conference proceedings
Name
Kappius, L.
6
Mantl, S.
Buchal, C.
3
Löken, M.
3
Mesters, S.
3
Zhao, Q. T.
3
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Bay, H. L.
2
Kabius, B.
2
Antons, A.
1
Breuer, U.
1
Dolle, M.
1
Heinig, K. H.
1
Klinkhammer, F.
1
Roelofs, A.
1
Siegert, M.
1
Trinkaus, H.
1
Tyagi, K.
1
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Research Program
Ionentechnik
5
ohne FE
1
Contributing Institute
Institut für Schicht- und Ionentechnik; ISI
6
Zentralabteilung für Chemische Analysen; ZCH
1
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1999
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