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2002
Elektrokeramische Materialien; IFF-EKM
Hoffmann, M.
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Liedtke, R.
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2002
Elektrokeramische Materialien; IFF-EKM
Hoffmann, M.
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Liedtke, R.
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Journal Article
Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for MEMS application
Hoffmann, M.
2002
Integrated ferroelectrics, 50 (2002) S. 21 - 32
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Böttger, U.
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Hoffmann, M.
Leuerer, T.
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Liedtke, R.
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Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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