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Journal Article
Titania-assisted electron-beam and synchrotron lithography
Skorb, E.
V
.
2010
Nanotechnology, 21 (2010) S. 315301
“
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Guzenko
,
V.A
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Journal Article
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Dais, C.
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Gaevskaya, T.V.
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Grützmacher, Detlev
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Guzenko, V.A.
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Skorb, E.V.
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Grundlagen für zukünftige Informationstechnologien
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Halbleiter-Nanoelektronik; IBN-1
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JARA-FIT; JARA-FIT
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