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Conference Presentation 95 Journal Article 74 Poster 39 Contribution to a conference proceedings 14 Contribution to a book 13 Talk (non-conference) 6 Book 1 more ... Report 1 less ...

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181

Conference Presentation

Liquid injection atomic layer deposition (LI-ALD) of ferroelectric oxide Pb(Zr,Ti)O3 films and metallic Ru thin films

Hoffmann-Eifert, S.
2008

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Select result number 182

182

Conference Presentation

Influence of strain relaxation and atomic interface configuration on the dielectric response of BST thin film capacitors

Dittmann, R.
2008

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Select result number 183

183

Journal Article

Growth behavior of atomic-layer-deposited Pb(Zr,Ti)Ox thin films on planar substrate and three-dimensional hole structures

Watanabe, T.
2008

Journal of the Electrochemical Society, 155 (2008) S. D715

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184

Conference Presentation

Conformal growth of homogeneous Pb(Zr,Ti)O3 films on 3D structures using a liquid injection ALD method

Hoffmann-Eifert, S.
2007

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185

Conference Presentation

Liquid injection atomic layer deposition of Pb(Zr,Ti)O3 thin films

Hoffmann-Eifert, S.
2007

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Select result number 186

186

Conference Presentation

Liquid injection atomic layer deposition of Pb(Zr,Ti)O3 thin films on three dimensional structures

Watanabe, T.
2007

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Select result number 187

187

Conference Presentation

Beyond CMOS: Integration of Electroceramic Thin Films

Hoffmann-Eifert, S.
2007

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Select result number 188

188

Journal Article

Growth of ternary PbTiOx films in a combination of binary oxide atomic layer depositions

Watanabe, T.
2007

Journal of applied physics, 101 (2007) S. 014114

“...Hoffmann-Eifert, S....”

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Select result number 189

189

Journal Article

Liquid Injection Atomic Layer Deposition of TiOx Films Using Ti[OCH(CH3)2]4

Watanabe, T.
2007

Journal of the Electrochemical Society, 154 (2007) S. G134 - G140

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Select result number 190

190

Journal Article

Liquid injection ALD of Pb(Zr,Ti)Ox thin films by a combination of self-regulating component oxide processes

Watanabe, T.
2007

Journal of the Electrochemical Society, 154 (2007) S. G262 - G269

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Select result number 191

191

Conference Presentation

Ba substituted Pb(ZrxTi1-x)O3 Thin Films grown by MOCVD

Puchalla, J.
2006

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Select result number 192

192

Journal Article

Electrical conductivity of epitaxial SrTiO3 thin films as a function of oxygen partial pressure and temperature

Ohly, C.
2006

Journal of the American Ceramic Society, 89 (2006) S. 2845

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193

Talk (non-conference)

Ferroelektrische Dünnschichten auf der Basis von Pb/ZryTi1-y)O3 für den Einsatz in nicht-flüchtigen Speichern (FeRAMs): Abscheidung mittels MOCVD und ALD und Charakterisierung

Hoffmann-Eifert, S.
2006

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194

Talk (non-conference)

Atomic layer deposition of multi component oxide thin films using liquid delivery source injection

Watanabe, T.
2006

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Select result number 195

195

Conference Presentation

Liquid injection atomic layer deposition of Pb(Zr,Ti)O3 thin films

Watanabe, T.
2006

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Select result number 196

196

Poster

Liquid injection atomic layer deposition of Pb(Zr,Ti)O3 thin films

Watanabe, T.
2006

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Select result number 197

197

Poster

Effect of Ba substitution on the structural and ferroelectric properties of Pb(ZrxTi1-x)O3 thin films grown by MOCVD

Puchalla, J.
2006

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Select result number 198

198

Conference Presentation

Liquid injection atomic layer deposition of Pb(Zr,Ti)Ox thin films

Watanabe, T.
2006

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Select result number 199

199

Journal Article

Liquid-injection atomic layer deposition of TiOx and Pb-Ti-O films

Watanabe, T.
2006

Journal of the Electrochemical Society, 153 (2006) S. F199 - F204

“...Hoffmann-Eifert, S....”

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200

Poster

Liquid delivery (LD) ALD of oxide thin films

Watanabe, T.
2005

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Publications database 236 Open Access 42

Conference Presentation 95 Journal Article 74 Poster 39 Contribution to a conference proceedings 14 Contribution to a book 13 Talk (non-conference) 6 more ... Book 1 Report 1 see all ... less ...

Waser, R. 160 Hoffmann-Eifert, Susanne 141 Hoffmann-Eifert, S. 95 Menzel, Stephan 54 Dittmann, Regina 37 Cüppers, Felix 30 more ... Hardtdegen, Alexander 30 Gunkel, Felix 29 Zhang, Hehe 24 Watanabe, T. 21 Aslam, Nabeel 20 Aussen, Stephan 18 Funck, Carsten 17 Hwang, C. S. 17 Böttger, U. 12 Wiefels, Stefan 12 Dittmann, R. 11 Rana, Vikas 11 Meuffels, Paul 10 Chekol, Solomon 9 Ohly, C. 9 Puchalla, J. 9 Bengel, Christopher 8 Mi, S. 8 Reiners, M. 8 Wang, Zhaodong 8 Waser, Rainer 8 Aslam, N. 7 Schnieders, Kristoffer 7 Wördenweber, Henrik 7 see all ... less ...

Grundlagen für zukünftige Informationstechnologien 58 Controlling Electron Charge-Based Phenomena 39 Memristive Materials and Devices 38 Controlling Collective States 36 Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik 32 Exploratory materials and phenomena 23 more ... Verbundprojekt: Neuro-inspirierte Technologien der künstlichen Intelligenz für die Elektronik der Zukunft - NEUROTEC II - 23 Verbundprojekt: Neuro-inspirierte Technologien der künstlichen Intelligenz für die Elektronik der Zukunft - NEUROTEC -, Teilvorhaben: Forschungszentrum Jülich 16 Verbundprojekt: Neuro-inspirierte Technologien der künstlichen Intelligenz für die Elektronik der Zukunft - NEUROTEC - 12 Advanced Computing Architectures 11 Festkörperforschung für die Informationstechnik 5 Frontiers of charge based Electronics 5 NeuroSys: "Memristor Crossbar Architekturen (Projekt A) - B" 4 Grundlagen der Ionentransportprozesse in resistiv schaltenden Oxiden (B03) 3 Emerging NC Architectures 2 Computation-in-memory architecture based on resistive devices 1 Controlling Configuration-Based Phenomena 1 Hardwarerealisierung von universellen speicherbasierten memristiven zellularen Rechnerstrukturen 1 Kryogene CMOS Technologie für die Realisierung von von klassischen QuBit-Kontrollschaltkreisen 1 Neuromorphic Computing and Network Dynamics 1 see all ... less ...

Elektronische Materialien; PGI-7 162 JARA-FIT; JARA-FIT 131 JARA Institut Green IT; PGI-10 73 Center of Nanoelectronic Systems for Information Technology; CNI 34 Elektronische Materialien; IFF-6 26 Elektronische Materialien; IFF-IEM 26 more ... Elektrokeramische Materialien; IFF-EKM 18 Mikrostrukturforschung; IFF-8 8 Halbleiter-Nanoelektronik; PGI-9 5 Materialwissenschaft u. Werkstofftechnik; ER-C-2 4 Mikrostrukturforschung; PGI-5 4 Mikrostrukturforschung; IFF-IMF 3 Neue Materialien und Chemie; PTJ-NMT 3 Bioelektronik; ICS-8 2 Institut für Festkörperforschung; IFF 2 Institut für Halbleiterschichten und Bauelemente; ISG-1 2 Physik Nanoskaliger Systeme; ER-C-1 2 Agrosphäre; IBG-3 1 Analytik; ZEA-3 1 Bioelektronik; PGI-8 1 Elektronische Eigenschaften; PGI-6 1 Helmholtz - Nanofacility; HNF 1 JARA - HPC; JARA-HPC 1 Science Office; PGI-SO 1 see all ... less ...

2014 20 2012 18 2016 17 2018 15 2021 15 2017 14 more ... 2015 13 2005 12 2022 10 2023 10 2006 9 2002 8 2008 8 2019 8 2007 7 2009 7 2011 7 2003 6 2020 6 2004 5 2013 5 2001 4 2010 4 2000 2 see all ... less ...

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