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Journal Article
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Journal Article
Study of structure and optical properties of beta-FeSi2 precipitates formed by ion-implantation of Fe+ in Si (100) and effect of co-implantation of Fe+ and Si+ in amorphous SiO2
Oyoshi
,
A
.
N
.
2001
Thin solid films, 381 (2001) S. 194 - 201
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,
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.
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2
Journal Article
Formation of beta-FeSi2 precipitates at the SiO2/Si interface by Fe+ ion-implantation and their structural and optical properties
Oyoshi
,
A
.
N
.
2001
Thin solid films, 381 (2001) S. 202 - 208
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...
Oyoshi
,
A
.
N
....
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2
Document Type
Journal Article
2
Name
Carius, R.
2
Lenssen, D.
2
Mantl, S.
2
Oyoshi, A. N.
2
Research Program
Grundlagen und Technologie von Dünnschichtsolarzellen
2
Ionentechnik
2
Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
2
Institut für Photovoltaik; IPV
2
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2001
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