Document Type within your search.
Document Type within your search.
1
Schäfer, Anna
2015
2015
Journal of vacuum science & technology / B, 33 (2015) 1, S. 01A104
“...Schroeder, Thomas...”
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Schäfer, A.
2014
2014
Semiconductor science and technology, 29 (2014) 7, S. 075005
“...Schroeder, T....”
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