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Journal Article
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Conference Presentation
1
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1
Journal Article
Comparison of precursors for pulsed metal-organic chemical vapor deposition of HfO2 high-k dielectric thin films
Teren
,
A
. R.
2005
Thin solid films, 478 (2005) S. 206
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. R....
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2
Journal Article
Microstructure and interfaces of HfO2 thin films grown on silicon substrates
He, J. Q.
2004
Journal of crystal growth, 262 (2004) S. 295 - 303
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3
Conference Presentation
Comparison of hafnium precursors for the MOCVD of HfO2 for gate dielectric applications
Teren
,
A
. R.
2003
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3
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Journal Article
2
Conference Presentation
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Ehrhart, P.
2
He, J. Q.
2
Jia, C. L.
2
Teren, A. R.
2
Waser, R.
2
Baumann, P. K.
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Erhart, P.
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He, J.
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Jones, A. C.
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Leedham, T. J.
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Lindner, J.
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Rushworth, S. R.
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Schumacher, M.
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Thomas, R.
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Wang, R. H.
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Research Program
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
3
Kondensierte Materie
1
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Mikrostrukturforschung; IFF-IMF
3
Center of Nanoelectronic Systems for Information Technology; CNI
2
Elektronische Materialien; IFF-IEM
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Elektrokeramische Materialien; IFF-EKM
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Scientific Report
2003
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2004
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