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1

Journal Article

The ultimate in real-time ellipsometry: Multichannel Mueller Matrix spectroscopy

Chen, C.
2006

Applied surface science, 253 (2006) S. 38 - 46

“...Collins, R. W....”

2

Conference Presentation

Multichannel Mueller matrix analysis of the evolution of surface roughness on different in-plane scales during polycrystalline film processing

Chen, C.
2005

“...Collins, R. W....”

3

Journal Article

Kinetics of silicon film growth and the deposition phase diagram

Ferreira, G. M.
2004

Journal of non-crystalline solids, 338-340 (2004) S. 13 - 18

“...Collins, R. W....”

4

Conference Presentation

Kinetics of silicon film growth and the deposition phase diagram

Ferreira, G. M.
2003

“...Collins, R. W....”

5

Evaluation of compositional depth profiles in mixed phase (amorphous crystalline) silicon films from real time spectroscopic ellipsometry

Ferreira, G. M.
2003

“...Carius, R....”

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