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Electron beam, x-ray, and ion beam technology: submicrometer lithographies. 0008: proceedings : San-Jose, CA, 01.03.89-03.03.89.
Yanof
,
A
.
W
.
1989
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Yanof
,
A
.
W
....
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Electron beam, x-ray and ion beam technology: submicrometer lithographies. 0007: conference : Santa-Clara, CA, 02.03.88-04.03.88.
Yanof
,
A
.
W
.
1988
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...
Yanof
,
A
.
W
....
”
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