Growth of single crystalline and polycrystalline titanium nitride and zirconium nitride thin films by reactive sputtering : influence of low energy ion irradiation / L. Hultman
Saved in:
Personal Name(s): | Hultman, L. |
---|---|
Imprint: |
Linköping :
Universitet i Linköping
|
Physical Description: |
187 S. |
Note: |
englisch |
ISBN: |
917870345X 9789178703456 |
Series Title: |
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Linköping studies in science and technology. Dissertations ;
186 |
Classification: |
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---|---|---|---|
001 | 128596 | ||
005 | 19980324000000.0 | ||
020 | |a 917870345X | ||
035 | |a (Sirsi) a114312 | ||
041 | |a eng | ||
084 | 0 | |a FGGE - Ion beam surface modification | |
084 | 0 | |a FNPD - Hard materials, refractory compounds | |
245 | 0 | 0 | |a Growth of single crystalline and polycrystalline titanium nitride and zirconium nitride thin films by reactive sputtering : |b influence of low energy ion irradiation / |c L. Hultman |
260 | |a Linköping : |b Universitet i Linköping | ||
300 | |a 187 S. | ||
490 | 0 | |a Linköping studies in science and technology. Dissertations ; |v 186 | |
500 | |a englisch | ||
596 | |a 1 | ||
700 | 1 | |a Hultman, L. | |
900 | |a S 006237-0186'01' | ||
908 | |a Hochschulschrift | ||
949 | |a S 006237-0186'01' |w LC |c 1 |i 1089200316 |l STACKS |m ZB |r Y |s Y |t ZBHS |u 25/3/2009 |x ZB-F |1 PRINT |2 HS |